Static and Eigenvalue Analysis of Electrostatically Coupled and Tunable Shallow Micro-Arches for Sensing-Based Applications

This paper investigated the mechanical performance of an electrostatically tunable microbeams-based resonators.The resonator was designed based on 6.55 two initially-curved microbeams that are electrostatically coupled, offering the potential for improved performance compared to single-beam based resonators.Analytical models and simulation tools we

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